Major equipment


Scanning Electron Microscopes
FEI NOVA NanoSEM 230 (Risk Assessment / Safe Work Procedure)
Hitachi S2700 LaB6*
Hitachi S3500N VP SEM*
Philips XL30 FEG SEM (Risk Assessment / Safe Work Procedure)
Philips XL30 FEG ESEM*

Scanning Probe Microscopes*
Environmental Scanning Probe Microscope System, JEOL JSPM 5200
Scanning Probe Microscope System, Digital Instruments DI3000 SPM

Semiconductor Device Probe Stations*
Probe Station, Micromanipulator
Wentworth PROBE STATION

Semiconductor Device Analysers*
Semiconductor Characterization System, Keithley 4200
Semiconductor Device Analyzer, Agilent B1500A

Optical Instruments*
Optical Microscopes

Sample Preparation Equipment
Sputter Coater (Risk Assessment / Safe Work Procedure)
Tube furnaces, 3-zone, 3"*
Edwards Auto 306 Thermal Evaporator ( (Risk Assessment / Safe Work Procedure)
Wire Bonder*


* These equipment are for internal usage only